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UHV z-travel units

The displacement units shown here are specially designed for our multi-cell evaporators and typically have a stroke of 170mm.
The clear width is 38mm. All z-travel units can be mounted on flange CF 35 - CF 40.

  • Compact z-travel based on high temperature plain bearings with
    replaceable bellows from VAT
  • Easy handling in the shift
  • Dimensions: length 426mm, width 80mm, height 126mm
  • The distance from the axis of the CF38 flange to the table is 50mm.
  • Bakeout temperature 200°C
  • adjustable clearance
  • Scale on the bottom for reading the stroke dimensions
  • Super Compact z-travel based on high temperature plain bearings with
    replaceable bellows from VAT
  • Dimensions: length 426mm, width 80mm, height 116mm
  • The distance from the axis of the CF38 flange to the table is 44mm.
  • Bakeout temperature 200°C
  • adjustable clearance
  • Scale on the bottom for reading the stroke dimensions
  • Compact z-travel unit from the bottom
  • an arrow marked the distance of the CF38 flanges
  • Variant of the Super Compact z-travel with smaller stroke of 100mm based on
    high temperature plain bearings with replaceable bellows from VAT
  • Dimensions: length 350mm, width 80mm, height 116mm
  • The distance from the axis of the CF38 flange to the table is 44mm.
  • Bakeout temperature 200°C
  • adjustable clearance
  • Scale on the bottom for reading the stroke dimensions
  • The z-travel sliding units can be combined with our multiple flange end pieces.
  • Left shows the flange with 4x CF16 outlets (polar angle 3x 30°, 1x 0°).
  • On the right is the hexagonal flange with 5x CF16 and one CF38 flange
    (azimuth angle -60°, -30°, 0°, 30°, 60°). A sixth CF16 is prepared with
    the cutting edge and 6x M4 threaded holes (azimuth angle 180°).
  • The flanges have a inner mounting level with 4x M2.5 threads, on a bolt circle of 34mm.
    The clear width is 30mm.
  • The clear width for the left flange is 16mm (CF16), for the right flange 40mm (CF38).



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